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Alter, Anne L.; Flader, Ian B.; Chen, Yunhan; Shin, Dongsuk D.; Kenny, Thomas W. (, Journal of Microelectromechanical Systems)null (Ed.)
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Miller, James M. L.; Zhu, Haoshen; Sundaram, Subramanian; Vukasin, Gabrielle D.; Chen, Yunhan; Flader, Ian B.; Shin, Dongsuk D.; Kenny, Thomas W. (, Journal of Microelectromechanical Systems)
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Miller, James_M_Lehto; Ansari, Azadeh; Heinz, David_B; Chen, Yunhan; Flader, Ian_B; Shin, Dongsuk_D; Villanueva, L_Guillermo; Kenny, Thomas_W (, Applied Physics Reviews)Quality factor (Q) is an important property of micro- and nano-electromechanical (MEM/NEM) resonators that underlie timing references, frequency sources, atomic force microscopes, gyroscopes, and mass sensors. Various methods have been utilized to tune the effective quality factor of MEM/NEM resonators, including external proportional feedback control, optical pumping, mechanical pumping, thermal-piezoresistive pumping, and parametric pumping. This work reviews these mechanisms and compares the effective Q tuning using a position-proportional and a velocity-proportional force expression. We further clarify the relationship between the mechanical Q, the effective Q, and the thermomechanical noise of a resonator. We finally show that parametric pumping and thermal-piezoresistive pumping enhance the effective Q of a micromechanical resonator by experimentally studying the thermomechanical noise spectrum of a device subjected to both techniques.more » « less
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Miller, James M.; Zhu, Haoshen; Heinz, David B.; Chen, Yunhan; Flader, Ian B.; Shin, Dongsuk D.; Lee, Joshua E.-Y.; Kenny, Thomas W. (, Physical Review Applied)
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